Micro-Nano Fabrication Platform Project
Project Area: 1,090 ㎡
Project Type: Semiconductor Laboratory
Project Description: This renovation project is located on the 1st floor and mezzanine of Building 6, Weiguang Life Science Park, Shenzhen City, Guangdong Province:
• 1st Floor：
EBL Electron Beam Lithography Area (Cleanliness Class 5, Yellow Light, 20±0.5℃, 45±5%), Photolithography Area (Cleanliness Class 5, Yellow Light, 20±2℃, 45±5%), Deposition Area (Cleanliness Class 5, White Light, 20±2℃, 45±5%), Material Entry & Temporary Storage & Gowning Room, Changing Room, Gray Area, Meeting Room, Gas Cylinder Room, Pure Water Room, Air-Conditioning Machinery Room, etc.
• 2nd Floor (Mezzanine)：
Office, Tea Room, Restroom, Strong Electricity Room, Weak Electricity Room, Central Control Room
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906B, 9th Floor, Lv Tianran Center, No. 2, Xingqi 1st Street, South Side of Huancheng Road, Xintang Town, Zengcheng District, Guangzhou City